EBL Grating Definition
EBL Grating Foundry Service
Process capability：
● Using High current direct electron beam writing, gratings can be defined at very fast pace.
● Very accurate pitch control: For 200nm pitch grating, the pitch accuracy is within +/-0.03nm.
● Can write uniform pitch grating, chirped grating and phase-shift gratings.
● With dielectric and InP/InGaAsP etch capability
EBL resist pattern:
Etched InP grating pattern
Cross-section of etched gratings:
Keyword:
EBL Grating Definition
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