EBL Grating Definition

EBL Grating Foundry Service


EBL Grating Definition

Process capability:

● Using High current direct electron beam writing, gratings can be defined at very fast pace.

● Very accurate pitch control: For 200nm pitch grating, the pitch accuracy is within +/-0.03nm.

● Can write uniform pitch grating, chirped grating and phase-shift gratings.

● With dielectric and InP/InGaAsP etch capability

 

EBL resist pattern:

 

Etched InP grating pattern

 

Cross-section of etched gratings:

 

Keyword:

EBL Grating Definition

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